Proceedings of International Conference on Applied Innovation in IT
2026/03/31, Volume 14, Issue 1, pp.563-571

Data-Driven Gas Sensing Analysis of Ti-Doped Cdo Thin Films


Hiba Rashid Shakir, Esraa Hassn Hadi, Tahseen H. Mubarak, Shaymaa A. Hussein, Nadir Fadhil Habubi, Sami Salman Chiad and Yassin Hasan Kadhim


Abstract: This work examines how titanium doping modifies the structural characteristics, surface morphology, and optical behavior of nanostructured CdO films fabricated through chemical spray pyrolysis (CSP). Thin films of pure CdO and Ti-incorporated CdO (at 2% and 4% doping levels) were successfully fabricated under controlled conditions, with precise temperature regulation at 450°C and uniform thickness distribution of 330±20 nm. XRD characterization revealed that all films exhibited a crystalline structure with predominant (111) orientation. The Grain size increased from 14.15 nm (undoped) to 17.83 nm (4% Ti-doped), while dislocation density and microstrain showed significant reduction, confirming enhanced crystalline perfection with Ti incorporation. AFM analysis revealed that Ti doping notably altered the surface morphology, reducing the average grain size by 46% (from 72.74 nm to 39.46 nm) and RMS roughness by 63% (from 8.76 nm to 3.21 nm), leading to enhanced surface uniformity. Optical characterization revealed an inverse relationship between Ti concentration and light transmittance, with concurrent increases in both absorption coefficient (α) and extinction coefficient (k). Ti-doped CdO sensors, especially at 4%, showed increased resistance and sensitivity to NO₂ due to enhanced surface reactivity and electronic modification. With increasing Ti concentration, CdO sensor sensitivity to NO₂ decreases significantly, dropping across all tested ppm levels due to reduced surface-to-volume ratio and increased charge carrier recombination.

Keywords: Cdo, Ti, Thin Films, Doping, Physical Properties, Spray Pyrolysis.

DOI: Under indexing

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