Proceedings of International Conference on Applied Innovation in IT
2026/03/31, Volume 14, Issue 1, pp.601-608

Data-Driven Gas Sensing Performance of Cuo Thin Films


Hussein Hassan Magli, Hiba Saad Rasheed, Shams Nassif Jassem, Wathiq Ayoub Taha Al Ramdhan and Rushdi Ibrahim Jasim


Abstract: This study investigates the synthesis and characterization of nanostructured CuO thin films deposit via chemical spray pyrolysis (CSP), emphasizing the effect of precursor solution concentrations (0.10 M, 0.15 M, and 0.20 M) on their physical properties. XRD analysis confirmed the monoclinic CuO phase with preferred (200) orientation. Increasing molarity enhanced crystallinity, as reflected by stronger diffraction peaks, larger grain sizes (17.08-19.84 nm), and reduced dislocation density and lattice strain. Morphological evaluation using AFM and SEM showed that higher molarity improved surface uniformity and reduced roughness (Rrms from 9.27 nm to 3.63 nm), with the 0.15 M film showing the most homogeneous texture. Optical analysis revealed a decrease in bandgap energy from 2.15 eV to 2.05 eV with increasing molarity, attributed to reduced quantum confinement in larger grains. All films exhibited high absorption coefficients (>4 × 10⁴ cm⁻¹), indicating potential for optoelectronic applications. Gas-sensing measurements demonstrated p-type semiconductor behavior, with resistance decreasing upon NO₂ exposure. The 0.20 M film achieved the highest sensitivity, around 30% greater than the 0.10 M sample-due to enhanced surface reactivity and charge transport, highlighting its suitability for gas sensor applications.

Keywords: Cuo, Nanostructured, CSP, Gas Sensing, Optical Properties, Sensitivity, Reactivity.

DOI: Under indexing

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